Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2◦ is achieved experimentally in both the x and y directions with the differential voltages ranging from −10 V to + 10 V. (Some figures in this article are in colour only in the electronic version)